VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
1
 
NORM
REGULAR
10
0
0
0
0
0
10
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
33
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
1000
-0.977517
2
counts
d
Transmission
d
pulse counting
0.2
4
4.00E-06
0
0
0
0
2048
38
44229
0.300125
0.586563
19636
0.586563
19506
0.585857
19550
0.585154
19279
0.584452
19467
0.583753
19550
0.583056
19683
0.582362
19464
0.581669
19304
0.580979
19233
0.580291
19568
0.579605
19244
0.578921
19375
0.578239
19245
0.57756
19776
0.576883
19603
0.576207
19520
0.575534
20219
0.574863
20169
0.574194
20664
0.573527
20845
0.572862
21101
0.5722
20593
0.571539
20280
0.57088
19818
0.570223
19961
0.569569
19758
0.568916
19385
0.568265
19291
0.567617
19512
0.56697
19449
0.566325
19092
0.565682
19234
0.565041
19074
0.564402
18976
0.563765
19053
0.56313
19304
0.562497
19139
0.561866
19056
0.561236
19432
0.560609
19146
0.559983
19336
0.559359
19353
0.558737
19247
0.558117
19475
0.557499
19599
0.556882
19503
0.556268
19591
0.555655
19404
0.555044
19665
0.554434
19616
0.553827
19663
0.553221
19711
0.552617
19713
0.552015
19909
0.551415
19422
0.550816
19920
0.550219
20170
0.549624
19942
0.54903
19735
0.548438
20096
0.547848
19788
0.54726
20100
0.546673
20212
0.546088
20228
0.545504
20178
0.544922
20145
0.544342
20090
0.543764
20296
0.543187
20281
0.542612
20203
0.542038
20514
0.541466
20432
0.540896
20662
0.540327
20399
0.53976
20731
0.539194
20268
0.53863
20487
0.538068
20542
0.537507
20723
0.536948
20712
0.53639
21025
0.535834
20550
0.535279
20656
0.534726
20935
0.534174
20735
0.533624
20873
0.533075
20875
0.532528
21028
0.531983
20976
0.531438
20871
0.530896
20988
0.530355
21024
0.529815
20736
0.529277
20857
0.52874
20869
0.528204
20911
0.527671
20923
0.527138
21163
0.526607
21299
0.526077
20993
0.525549
21340
0.525022
21055
0.524497
21240
0.523973
21642
0.52345
21394
0.522929
21249
0.522409
21369
0.521891
21470
0.521374
21423
0.520858
21691
0.520344
21664
0.519831
21623
0.519319
21570
0.518809
21874
0.5183
21914
0.517792
21939
0.517286
21810
0.516781
21841
0.516277
21928
0.515775
21729
0.515274
21855
0.514774
22088
0.514276
22265
0.513778
22218
0.513282
22087
0.512788
22136
0.512294
21839
0.511802
22407
0.511311
22079
0.510822
22228
0.510333
22043
0.509846
22157
0.50936
22474
0.508876
22666
0.508392
22622
0.50791
22468
0.507429
22366
0.506949
22466
0.506471
22695
0.505993
22712
0.505517
22585
0.505042
22675
0.504569
22761
0.504096
22726
0.503625
22600
0.503154
22750
0.502685
22855
0.502217
22878
0.501751
22985
0.501285
22878
0.500821
22734
0.500357
23225
0.499895
23147
0.499434
23254
0.498974
22972
0.498515
23138
0.498058
23356
0.497601
23247
0.497146
22976
0.496692
23170
0.496238
23612
0.495786
23602
0.495335
23343
0.494885
23329
0.494437
23488
0.493989
23415
0.493542
23595
0.493097
23515
0.492652
23662
0.492209
23586
0.491766
23775
0.491325
23906
0.490885
23873
0.490445
23909
0.490007
24065
0.48957
23742
0.489134
24096
0.488699
23755
0.488265
23879
0.487832
24012
0.4874
24198
0.486969
24437
0.486539
24305
0.48611
24272
0.485682
24145
0.485255
24129
0.48483
24281
0.484405
24868
0.483981
24506
0.483558
24526
0.483136
24352
0.482715
24585
0.482295
24717
0.481876
24764
0.481458
24667
0.481041
24652
0.480624
24544
0.480209
24793
0.479795
24904
0.479382
24737
0.47897
24922
0.478558
24777
0.478148
24789
0.477738
25159
0.47733
25155
0.476922
25192
0.476515
25132
0.47611
25002
0.475705
25373
0.475301
25453
0.474898
25063
0.474496
25153
0.474094
25369
0.473694
25573
0.473295
25429
0.472896
25729
0.472499
25613
0.472102
25765
0.471706
25746
0.471311
25698
0.470917
25678
0.470524
25822
0.470131
25884
0.46974
25880
0.469349
25621
0.46896
25802
0.468571
25835
0.468183
26029
0.467796
25991
0.467409
26350
0.467024
26159
0.466639
26058
0.466256
26202
0.465873
26200
0.465491
26445
0.465109
26326
0.464729
26320
0.464349
26449
0.463971
26605
0.463593
26763
0.463215
26421
0.462839
26785
0.462464
26895
0.462089
26506
0.461715
26595
0.461342
26809
0.46097
26703
0.460598
27273
0.460228
26990
0.459858
26839
0.459489
27253
0.459121
26978
0.458753
27276
0.458386
27388
0.45802
27430
0.457655
26925
0.457291
27444
0.456927
27588
0.456564
27415
0.456202
27489
0.455841
27177
0.455481
27656
0.455121
27871
0.454762
27775
0.454403
27710
0.454046
27761
0.453689
27819
0.453333
27776
0.452978
27891
0.452623
27730
0.452269
27998
0.451916
27880
0.451564
28113
0.451213
28311
0.450862
27922
0.450511
28228
0.450162
28136
0.449813
28331
0.449465
28111
0.449118
28580
0.448772
28597
0.448426
28406
0.448081
28725
0.447736
28642
0.447393
28529
0.44705
28652
0.446707
28679
0.446366
28616
0.446025
28803
0.445684
28836
0.445345
29191
0.445006
28924
0.444668
28960
0.44433
29264
0.443994
29028
0.443658
29262
0.443322
29099
0.442987
29310
0.442653
29143
0.44232
29301
0.441987
29212
0.441655
29320
0.441324
29645
0.440993
29555
0.440663
29644
0.440333
29650
0.440005
29487
0.439676
29913
0.439349
29961
0.439022
30026
0.438696
29774
0.438371
29727
0.438046
29968
0.437721
30054
0.437398
30032
0.437075
29901
0.436752
30138
0.436431
30358
0.43611
30331
0.435789
30151
0.435469
30517
0.43515
30557
0.434832
30506
0.434514
30555
0.434196
30752
0.43388
30591
0.433564
30683
0.433248
30589
0.432933
30975
0.432619
30858
0.432305
30655
0.431992
30598
0.43168
30820
0.431368
31229
0.431057
30888
0.430746
30967
0.430436
31160
0.430127
30989
0.429818
31576
0.42951
31389
0.429202
31426
0.428895
31421
0.428588
31329
0.428282
31632
0.427977
31505
0.427672
31655
0.427368
31582
0.427065
31674
0.426762
31927
0.426459
32097
0.426157
31450
0.425856
31434
0.425555
31726
0.425255
32045
0.424955
31916
0.424656
31713
0.424358
32024
0.42406
32440
0.423762
32244
0.423466
32146
0.423169
31961
0.422874
32194
0.422579
32255
0.422284
32013
0.42199
32105
0.421696
32357
0.421403
31868
0.421111
32519
0.420819
32343
0.420528
32689
0.420237
32516
0.419946
32672
0.419657
32619
0.419368
32858
0.419079
32652
0.418791
32810
0.418503
32437
0.418216
32803
0.417929
32769
0.417643
33018
0.417358
32770
0.417073
33281
0.416788
33066
0.416504
32898
0.416221
33004
0.415938
33078
0.415655
32968
0.415373
33181
0.415092
33364
0.414811
33437
0.414531
33071
0.414251
33230
0.413971
33137
0.413693
33232
0.413414
33495
0.413136
33750
0.412859
33422
0.412582
33529
0.412305
33328
0.41203
34023
0.411754
33876
0.411479
34018
0.411205
34251
0.410931
33661
0.410657
33922
0.410384
34286
0.410112
34213
0.40984
34181
0.409568
34119
0.409297
34257
0.409027
34384
0.408757
34437
0.408487
34233
0.408218
34223
0.407949
34072
0.407681
34021
0.407413
33573
0.407146
33507
0.406879
33371
0.406613
33414
0.406347
33287
0.406081
33468
0.405816
33415
0.405552
33490
0.405288
33377
0.405024
33567
0.404761
33579
0.404499
33591
0.404236
33732
0.403975
33650
0.403713
33755
0.403452
33418
0.403192
33732
0.402932
33909
0.402673
33989
0.402414
33785
0.402155
33933
0.401897
33915
0.401639
34061
0.401382
33850
0.401125
34066
0.400868
33740
0.400612
33510
0.400357
33750
0.400102
33374
0.399847
33405
0.399593
33876
0.399339
33656
0.399086
33790
0.398833
33944
0.39858
34054
0.398328
34053
0.398076
34131
0.397825
34055
0.397574
34407
0.397324
34664
0.397074
34412
0.396824
34187
0.396575
33729
0.396326
33657
0.396078
34296
0.39583
33527
0.395583
33674
0.395335
33796
0.395089
33792
0.394843
33505
0.394597
33576
0.394351
33741
0.394106
33871
0.393862
33668
0.393617
33773
0.393374
33977
0.39313
34715
0.392887
35964
0.392644
39198
0.392402
44229
0.39216
43855
0.391919
37159
0.391678
33519
0.391437
33193
0.391197
32721
0.390957
32906
0.390718
32938
0.390479
33245
0.39024
33146
0.390002
33739
0.389764
33647
0.389526
34254
0.389289
34590
0.389052
34237
0.388816
34782
0.38858
34408
0.388344
33779
0.388109
33373
0.387874
33476
0.38764
33243
0.387406
33319
0.387172
33319
0.386939
33937
0.386706
33589
0.386473
33508
0.386241
32941
0.386009
32828
0.385778
32495
0.385547
32227
0.385316
31818
0.385086
32065
0.384856
31606
0.384626
31768
0.384397
31675
0.384168
31132
0.383939
31340
0.383711
31782
0.383483
31846
0.383256
32096
0.383029
32134
0.382802
32512
0.382576
32041
0.38235
32542
0.382124
32266
0.381899
31955
0.381674
32073
0.381449
31916
0.381225
31876
0.381001
31544
0.380777
31402
0.380554
31048
0.380331
31383
0.380109
31350
0.379887
31113
0.379665
30673
0.379443
30975
0.379222
31010
0.379001
30886
0.378781
30897
0.378561
30623
0.378341
30812
0.378122
31048
0.377903
30861
0.377684
30984
0.377465
30912
0.377247
31359
0.37703
31020
0.376812
30958
0.376595
30765
0.376379
31077
0.376162
31061
0.375946
30959
0.37573
31132
0.375515
30762
0.3753
31110
0.375085
31128
0.374871
30904
0.374657
30793
0.374443
30226
0.374229
30059
0.374016
30145
0.373803
30368
0.373591
29651
0.373379
30152
0.373167
30068
0.372956
29780
0.372744
30069
0.372533
30148
0.372323
30083
0.372113
30239
0.371903
30409
0.371693
30300
0.371484
30328
0.371275
30585
0.371066
30532
0.370858
30318
0.37065
30559
0.370442
30302
0.370235
30605
0.370028
30033
0.369821
29775
0.369614
29798
0.369408
29794
0.369202
29683
0.368997
29595
0.368791
29991
0.368586
30449
0.368382
31487
0.368177
33569
0.367973
34709
0.36777
34150
0.367566
33368
0.367363
33144
0.36716
33407
0.366958
31255
0.366755
29312
0.366553
28125
0.366352
27666
0.36615
26844
0.365949
26020
0.365749
25608
0.365548
25864
0.365348
25785
0.365148
25645
0.364948
25730
0.364749
25890
0.36455
25630
0.364351
25244
0.364153
25252
0.363955
25589
0.363757
25393
0.363559
25662
0.363362
25676
0.363165
25776
0.362968
26477
0.362772
27289
0.362576
28199
0.36238
28674
0.362184
28325
0.361989
27830
0.361794
27848
0.361599
27880
0.361404
26129
0.36121
25043
0.361016
25176
0.360823
24606
0.360629
24293
0.360436
23818
0.360243
23937
0.360051
23609
0.359859
23708
0.359667
23457
0.359475
23478
0.359283
23502
0.359092
23532
0.358901
23616
0.358711
23752
0.35852
23848
0.35833
23832
0.35814
24025
0.357951
24129
0.357762
24294
0.357573
24624
0.357384
24952
0.357195
25145
0.357007
24348
0.356819
23569
0.356631
23132
0.356444
22500
0.356257
22528
0.35607
22696
0.355883
22824
0.355697
22966
0.355511
23102
0.355325
23643
0.355139
23681
0.354954
23209
0.354769
22649
0.354584
22306
0.354399
21949
0.354215
21779
0.354031
21297
0.353847
21562
0.353664
21172
0.35348
21239
0.353297
21358
0.353114
20991
0.352932
21214
0.352749
21240
0.352567
20938
0.352386
20953
0.352204
20887
0.352023
21118
0.351842
21186
0.351661
21322
0.35148
21450
0.3513
21477
0.35112
21617
0.35094
21835
0.350761
22296
0.350581
22507
0.350402
22415
0.350223
22046
0.350045
21323
0.349866
21423
0.349688
20897
0.34951
21125
0.349333
21195
0.349155
21199
0.348978
21411
0.348801
21178
0.348625
21007
0.348448
21001
0.348272
20821
0.348096
20813
0.34792
20999
0.347745
20936
0.34757
20641
0.347395
20959
0.34722
21161
0.347045
20778
0.346871
20740
0.346697
20898
0.346523
20982
0.34635
20918
0.346176
21150
0.346003
21087
0.34583
21157
0.345657
20945
0.345485
21192
0.345313
21161
0.345141
21132
0.344969
21033
0.344797
21130
0.344626
20934
0.344455
20953
0.344284
20802
0.344113
20966
0.343943
20726
0.343773
20737
0.343603
20816
0.343433
20695
0.343264
20479
0.343094
20563
0.342925
20560
0.342756
20442
0.342588
20854
0.342419
21213
0.342251
21292
0.342083
21801
0.341916
23466
0.341748
29875
0.341581
34153
0.341414
26421
0.341247
20976
0.34108
20200
0.340914
20225
0.340747
19957
0.340581
20091
0.340416
20174
0.34025
19687
0.340085
19380
0.33992
18889
0.339755
18526
0.33959
18252
0.339425
18151
0.339261
17870
0.339097
17694
0.338933
18133
0.33877
18288
0.338606
18576
0.338443
18167
0.33828
19002
0.338117
19983
0.337954
22399
0.337792
26642
0.33763
26754
0.337468
22236
0.337306
19144
0.337144
18393
0.336983
18533
0.336822
17061
0.336661
15083
0.3365
14142
0.33634
13686
0.336179
13107
0.336019
13384
0.335859
13251
0.3357
13157
0.33554
13310
0.335381
13401
0.335222
13134
0.335063
13402
0.334904
13535
0.334745
13589
0.334587
13520
0.334429
13609
0.334271
13178
0.334113
12895
0.333956
12843
0.333798
12725
0.333641
12213
0.333484
12229
0.333328
12147
0.333171
12507
0.333015
12574
0.332859
12597
0.332703
12630
0.332547
12560
0.332391
13032
0.332236
13854
0.332081
16031
0.331926
17717
0.331771
16338
0.331616
13898
0.331462
12359
0.331308
12072
0.331154
11780
0.331
10835
0.330846
10669
0.330693
10044
0.33054
10048
0.330386
9764
0.330234
9685
0.330081
9821
0.329928
9886
0.329776
9862
0.329624
10032
0.329472
10108
0.32932
10059
0.329169
10153
0.329017
10399
0.328866
10537
0.328715
11393
0.328564
11696
0.328414
10976
0.328263
10143
0.328113
9567
0.327963
9428
0.327813
9601
0.327663
9488
0.327513
9363
0.327364
9294
0.327215
9373
0.327066
9405
0.326917
9329
0.326768
9435
0.32662
9428
0.326472
9380
0.326324
9302
0.326176
9395
0.326028
9339
0.32588
9342
0.325733
9529
0.325586
9420
0.325439
9523
0.325292
9402
0.325145
9531
0.324999
9385
0.324852
9504
0.324706
9732
0.32456
9656
0.324414
9759
0.324269
9620
0.324123
9724
0.323978
9671
0.323833
9523
0.323688
9410
0.323543
9323
0.323399
9247
0.323254
9221
0.32311
9239
0.322966
9226
0.322822
9199
0.322678
9274
0.322535
9680
0.322391
10147
0.322248
10674
0.322105
11920
0.321962
12445
0.321819
11447
0.321677
10102
0.321534
9399
0.321392
8906
0.32125
8555
0.321108
8427
0.320967
8099
0.320825
7931
0.320684
7720
0.320543
7682
0.320401
7694
0.320261
7791
0.32012
8345
0.319979
8777
0.319839
9633
0.319699
10150
0.319559
9372
0.319419
9354
0.319279
9816
0.31914
11379
0.319
11569
0.318861
9200
0.318722
7418
0.318583
6612
0.318444
6080
0.318306
5899
0.318167
5882
0.318029
5802
0.317891
5546
0.317753
5784
0.317615
5689
0.317477
5785
0.31734
5789
0.317203
5916
0.317065
5948
0.316928
6165
0.316792
5881
0.316655
5945
0.316518
5982
0.316382
5859
0.316246
6160
0.31611
6339
0.315974
6052
0.315838
5283
0.315702
5070
0.315567
4888
0.315432
4845
0.315297
4804
0.315162
4811
0.315027
5420
0.314892
6165
0.314758
7379
0.314623
8215
0.314489
8293
0.314355
9021
0.314221
10229
0.314087
9978
0.313954
7706
0.31382
5645
0.313687
4538
0.313554
3950
0.313421
3665
0.313288
3527
0.313155
3446
0.313023
3409
0.31289
3404
0.312758
3284
0.312626
3333
0.312494
3272
0.312362
3361
0.312231
3267
0.312099
3284
0.311968
3205
0.311837
3214
0.311705
3227
0.311575
3242
0.311444
3219
0.311313
3163
0.311183
3179
0.311052
3175
0.310922
3297
0.310792
3218
0.310662
3226
0.310533
3191
0.310403
3227
0.310273
3381
0.310144
3580
0.310015
4065
0.309886
3858
0.309757
3351
0.309628
3122
0.3095
3164
0.309371
3156
0.309243
3173
0.309115
3215
0.308987
3081
0.308859
3285
0.308731
3155
0.308603
3323
0.308476
3280
0.308349
3433
0.308221
3451
0.308094
3438
0.307967
3592
0.307841
3507
0.307714
3529
0.307588
3307
0.307461
3083
0.307335
2841
0.307209
2737
0.307083
2568
0.306957
2633
0.306832
2499
0.306706
2391
0.306581
2434
0.306455
2349
0.30633
2483
0.306205
2868
0.30608
3376
0.305956
3592
0.305831
6173
0.305707
9641
0.305582
5677
0.305458
2350
0.305334
1998
0.30521
1932
0.305087
1881
0.304963
1873
0.304839
1779
0.304716
1600
0.304593
1468
0.30447
1423
0.304347
1308
0.304224
1276
0.304101
1265
0.303979
1169
0.303856
1282
0.303734
1349
0.303612
1445
0.30349
1537
0.303368
1767
0.303246
2633
0.303124
5355
0.303003
7047
0.302881
4973
0.30276
1593
0.302639
790
0.302518
655
0.302397
580
0.302276
614
0.302156
637
0.302035
656
0.301915
680
0.301795
620
0.301674
625
0.301554
597
0.301435
686
0.301315
603
0.301195
623
0.301076
638
0.300956
630
0.300837
567
0.300718
395
0.300599
143
0.30048
57
0.300362
39
0.300243
38
0.300125
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
297
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
4
4.00E-06
0
0
0
0
256
0
2124
0.339651
0.343066
163
0.343066
288
0.343039
287
0.343011
335
0.342984
303
0.342957
155
0.34293
318
0.342902
291
0.342875
335
0.342848
291
0.342821
292
0.342794
322
0.342766
281
0.342739
262
0.342712
286
0.342685
317
0.342658
376
0.342631
382
0.342603
253
0.342576
249
0.342549
343
0.342522
369
0.342495
351
0.342468
331
0.342441
383
0.342413
386
0.342386
301
0.342359
311
0.342332
391
0.342305
354
0.342278
311
0.342251
403
0.342224
309
0.342197
355
0.34217
434
0.342143
290
0.342116
279
0.342089
330
0.342062
330
0.342034
359
0.342007
380
0.34198
360
0.341953
387
0.341926
394
0.341899
446
0.341872
504
0.341845
456
0.341818
547
0.341791
574
0.341764
752
0.341737
775
0.341711
898
0.341684
1049
0.341657
1170
0.34163
1512
0.341603
1550
0.341576
1818
0.341549
2011
0.341522
2035
0.341495
2124
0.341468
2053
0.341441
1880
0.341414
1621
0.341387
1426
0.34136
1173
0.341334
1086
0.341307
724
0.34128
696
0.341253
514
0.341226
443
0.341199
332
0.341172
337
0.341146
253
0.341119
234
0.341092
139
0.341065
215
0.341038
257
0.341011
169
0.340985
125
0.340958
222
0.340931
208
0.340904
269
0.340877
277
0.340851
205
0.340824
209
0.340797
204
0.34077
140
0.340744
254
0.340717
193
0.34069
219
0.340663
251
0.340637
189
0.34061
187
0.340583
249
0.340556
265
0.34053
202
0.340503
230
0.340476
227
0.340449
242
0.340423
233
0.340396
153
0.340369
200
0.340343
215
0.340316
144
0.340289
215
0.340263
183
0.340236
118
0.340209
171
0.340183
137
0.340156
145
0.340129
189
0.340103
118
0.340076
183
0.34005
119
0.340023
121
0.339996
76
0.33997
28
0.339943
100
0.339917
137
0.33989
0
0.339863
48
0.339837
95
0.33981
142
0.339784
84
0.339757
80
0.339731
68
0.339704
87
0.339678
56
0.339651
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
55
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
256
0
1780
0.304446
0.306991
273
0.306991
217
0.30697
229
0.30695
240
0.30693
216
0.30691
228
0.306889
222
0.306869
219
0.306849
193
0.306829
250
0.306808
235
0.306788
211
0.306768
181
0.306748
225
0.306727
228
0.306707
223
0.306687
203
0.306667
207
0.306647
244
0.306626
249
0.306606
250
0.306586
238
0.306566
196
0.306546
213
0.306525
226
0.306505
210
0.306485
209
0.306465
220
0.306445
174
0.306425
189
0.306404
207
0.306384
198
0.306364
193
0.306344
185
0.306324
195
0.306304
169
0.306284
183
0.306263
241
0.306243
269
0.306223
216
0.306203
249
0.306183
303
0.306163
269
0.306143
262
0.306123
319
0.306102
320
0.306082
308
0.306062
360
0.306042
339
0.306022
321
0.306002
325
0.305982
349
0.305962
322
0.305942
324
0.305922
326
0.305902
328
0.305881
359
0.305861
387
0.305841
412
0.305821
520
0.305801
623
0.305781
766
0.305761
963
0.305741
1085
0.305721
1380
0.305701
1504
0.305681
1670
0.305661
1780
0.305641
1716
0.305621
1649
0.305601
1575
0.305581
1322
0.305561
1102
0.305541
781
0.305521
583
0.305501
391
0.305481
255
0.305461
177
0.305441
143
0.305421
166
0.305401
100
0.305381
105
0.305361
130
0.305341
143
0.305321
86
0.305301
108
0.305281
112
0.305261
83
0.305241
71
0.305221
97
0.305201
101
0.305181
88
0.305161
138
0.305141
86
0.305121
111
0.305102
103
0.305082
116
0.305062
97
0.305042
91
0.305022
117
0.305002
103
0.304982
73
0.304962
100
0.304942
109
0.304922
106
0.304902
117
0.304882
82
0.304863
76
0.304843
102
0.304823
98
0.304803
66
0.304783
101
0.304763
91
0.304743
84
0.304723
68
0.304704
63
0.304684
44
0.304664
73
0.304644
56
0.304624
11
0.304604
58
0.304584
10
0.304565
34
0.304545
48
0.304525
3
0.304505
31
0.304485
26
0.304466
0
0.304446
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_4
data_4
-1
Binding energy
eV
32
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
256
0
1244
0.301588
0.304069
132
0.304069
148
0.304049
114
0.304029
141
0.30401
125
0.30399
115
0.30397
107
0.30395
114
0.303931
139
0.303911
127
0.303891
126
0.303871
142
0.303852
129
0.303832
123
0.303812
144
0.303793
137
0.303773
130
0.303753
139
0.303734
141
0.303714
160
0.303694
162
0.303674
158
0.303655
144
0.303635
134
0.303615
166
0.303596
163
0.303576
157
0.303556
197
0.303537
138
0.303517
184
0.303497
168
0.303478
162
0.303458
190
0.303438
211
0.303419
201
0.303399
180
0.30338
163
0.30336
159
0.30334
170
0.303321
209
0.303301
171
0.303281
176
0.303262
170
0.303242
216
0.303223
229
0.303203
240
0.303183
308
0.303164
368
0.303144
466
0.303125
544
0.303105
693
0.303085
833
0.303066
940
0.303046
1041
0.303027
1101
0.303007
1131
0.302988
1191
0.302968
1204
0.302948
1244
0.302929
1220
0.302909
1241
0.30289
1215
0.30287
1178
0.302851
1048
0.302831
787
0.302812
616
0.302792
436
0.302773
296
0.302753
216
0.302734
137
0.302714
105
0.302694
82
0.302675
77
0.302655
47
0.302636
34
0.302616
15
0.302597
34
0.302577
45
0.302558
35
0.302538
23
0.302519
25
0.3025
24
0.30248
10
0.302461
31
0.302441
38
0.302422
20
0.302402
28
0.302383
2
0.302363
10
0.302344
13
0.302324
4
0.302305
6
0.302285
1
0.302266
21
0.302247
13
0.302227
22
0.302208
6
0.302188
2
0.302169
34
0.302149
33
0.30213
19
0.302111
17
0.302091
5
0.302072
26
0.302052
18
0.302033
30
0.302014
8
0.301994
28
0.301975
42
0.301955
35
0.301936
12
0.301917
31
0.301897
20
0.301878
21
0.301858
30
0.301839
23
0.30182
38
0.3018
35
0.301781
28
0.301762
24
0.301742
0
0.301723
41
0.301704
8
0.301684
23
0.301665
14
0.301646
2
0.301626
20
0.301607
29
0.301588
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_5
data_5
-1
Binding energy
eV
544
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
10
4.00E-06
0
0
0
0
256
0
4649
0.389539
0.394477
777
0.394477
655
0.394437
872
0.394398
726
0.394358
676
0.394319
644
0.394279
571
0.39424
547
0.3942
593
0.394161
688
0.394121
665
0.394082
742
0.394043
773
0.394003
590
0.393964
590
0.393924
591
0.393885
725
0.393846
524
0.393806
752
0.393767
646
0.393727
727
0.393688
735
0.393649
766
0.393609
621
0.39357
702
0.393531
564
0.393492
697
0.393452
687
0.393413
737
0.393374
681
0.393335
768
0.393295
791
0.393256
667
0.393217
614
0.393178
669
0.393138
807
0.393099
664
0.39306
860
0.393021
828
0.392982
879
0.392943
926
0.392904
871
0.392864
1021
0.392825
1019
0.392786
1092
0.392747
1343
0.392708
1333
0.392669
1610
0.39263
1494
0.392591
1776
0.392552
1834
0.392513
2045
0.392474
2171
0.392435
2566
0.392396
2606
0.392357
2991
0.392318
2898
0.392279
3243
0.39224
3684
0.392201
4250
0.392162
3965
0.392123
4550
0.392084
4640
0.392045
4649
0.392006
4558
0.391968
4405
0.391929
3839
0.39189
3413
0.391851
2895
0.391812
2244
0.391773
1812
0.391734
1468
0.391696
1015
0.391657
911
0.391618
802
0.391579
493
0.391541
596
0.391502
341
0.391463
293
0.391424
410
0.391386
501
0.391347
407
0.391308
419
0.391269
318
0.391231
177
0.391192
342
0.391153
372
0.391115
408
0.391076
133
0.391037
236
0.390999
346
0.39096
218
0.390922
0
0.390883
171
0.390844
306
0.390806
202
0.390767
195
0.390729
202
0.39069
247
0.390652
364
0.390613
187
0.390575
272
0.390536
349
0.390498
138
0.390459
279
0.390421
356
0.390382
220
0.390344
107
0.390305
213
0.390267
308
0.390228
242
0.39019
349
0.390152
494
0.390113
295
0.390075
407
0.390037
345
0.389998
373
0.38996
397
0.389921
481
0.389883
233
0.389845
434
0.389806
192
0.389768
384
0.38973
269
0.389692
371
0.389653
311
0.389615
193
0.389577
575
0.389539
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_6
data_6
-1
Binding energy
eV
295
-0.141732
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
1018.29
2209.93
0.339651
0.34272
1562.53
0.34272
1332.89
0.342696
1328.71
0.342671
1267.54
0.342647
1243.3
0.342622
1237.78
0.342598
1343.47
0.342574
1332.57
0.342549
1334.08
0.342525
1322.8
0.3425
1304.79
0.342476
1318.48
0.342451
1332.79
0.342427
1278.35
0.342403
1341.58
0.342378
1261.01
0.342354
1284.07
0.342329
1222.54
0.342305
1298.55
0.342281
1317.22
0.342256
1172.29
0.342232
1283.74
0.342208
1270.31
0.342183
1250.51
0.342159
1243.94
0.342135
1217.35
0.34211
1314.58
0.342086
1239.51
0.342062
1255.7
0.342037
1232.26
0.342013
1273.3
0.341989
1320.63
0.341964
1239.17
0.34194
1253.42
0.341916
1259.18
0.341891
1304.94
0.341867
1351.43
0.341843
1250.5
0.341818
1255.53
0.341794
1358.23
0.34177
1416.24
0.341746
1324.53
0.341721
1423.33
0.341697
1488.77
0.341673
1572.74
0.341649
1632.56
0.341624
1770.81
0.3416
1821.19
0.341576
1846.59
0.341552
2061.75
0.341527
2123.27
0.341503
2120.31
0.341479
2209.93
0.341455
2178.8
0.34143
2200.16
0.341406
2161.28
0.341382
2087.1
0.341358
1851.21
0.341334
1841.22
0.341309
1594.45
0.341285
1661.05
0.341261
1481.58
0.341237
1377.7
0.341213
1277.36
0.341188
1225.38
0.341164
1195.68
0.34114
1098.69
0.341116
1163.02
0.341092
1199.61
0.341068
1084.8
0.341044
1127.51
0.341019
1232.86
0.340995
1164.5
0.340971
1150.56
0.340947
1138.32
0.340923
1181.43
0.340899
1201.58
0.340875
1201.49
0.340851
1082.25
0.340826
1084.62
0.340802
1125.47
0.340778
1078.34
0.340754
1175.8
0.34073
1180.28
0.340706
1113.48
0.340682
1177.33
0.340658
1137.67
0.340634
1141.47
0.34061
1141.37
0.340586
1068.13
0.340562
1132.55
0.340538
1131.23
0.340514
1140.07
0.34049
1101.29
0.340465
1112.45
0.340441
1124.82
0.340417
1192.63
0.340393
1147.6
0.340369
1051.82
0.340345
1080.38
0.340321
1108.83
0.340297
1125.91
0.340273
1094.7
0.340249
1074.55
0.340225
1109.91
0.340201
1129.38
0.340177
1089.29
0.340153
1119.87
0.340129
1079.79
0.340106
1086.4
0.340082
1069.1
0.340058
1070.24
0.340034
1083.76
0.34001
1147.62
0.339986
1087.32
0.339962
1056.51
0.339938
1018.29
0.339914
1118.41
0.33989
1081.27
0.339866
1065.37
0.339842
1086.8
0.339818
1060.92
0.339794
1066.53
0.33977
1072.35
0.339747
1050.87
0.339723
1089.13
0.339699
1034.1
0.339675
1215.12
0.339651
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_7
data_7
-1
Binding energy
eV
53
-0.141732
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
442.458
3350.67
0.304446
0.306733
1094.04
0.306733
911.112
0.306715
862.273
0.306697
793.352
0.306679
859.9
0.306661
850.505
0.306643
814.393
0.306624
822.133
0.306606
839.53
0.306588
802.021
0.30657
783.088
0.306552
755.742
0.306534
785.783
0.306515
818.102
0.306497
774.155
0.306479
785.423
0.306461
818.608
0.306443
754.852
0.306425
754.434
0.306406
780.017
0.306388
723.506
0.30637
764.738
0.306352
773.977
0.306334
743.516
0.306316
788.684
0.306298
787.699
0.30628
813.635
0.306261
834.267
0.306243
750.852
0.306225
831.509
0.306207
804.814
0.306189
777.605
0.306171
836.415
0.306153
792.138
0.306135
892.228
0.306117
891.729
0.306098
957.266
0.30608
901.422
0.306062
970.086
0.306044
1026.7
0.306026
927.662
0.306008
950.89
0.30599
1014.38
0.305972
998.906
0.305954
927.457
0.305936
935.478
0.305918
897.268
0.3059
956.287
0.305881
976.33
0.305863
986.848
0.305845
1009.95
0.305827
1109.35
0.305809
1212.07
0.305791
1340.89
0.305773
1581.84
0.305755
1695.16
0.305737
2015.47
0.305719
2215.07
0.305701
2416.67
0.305683
2667.55
0.305665
2934.48
0.305647
3350.67
0.305629
3258.29
0.305611
3178.9
0.305593
3085.68
0.305575
2931.71
0.305557
2490.71
0.305539
2249.33
0.305521
2010.49
0.305503
1688.28
0.305485
1347.99
0.305467
1101.03
0.305449
910.426
0.305431
826.018
0.305413
780.804
0.305395
731.01
0.305377
691.974
0.305359
681.644
0.305341
661.95
0.305323
659.935
0.305305
599.769
0.305287
613.796
0.305269
675.955
0.305251
601.237
0.305233
615.948
0.305215
587.202
0.305197
604.951
0.305179
638.67
0.305161
617.913
0.305143
613.331
0.305125
584.199
0.305108
561.671
0.30509
597.972
0.305072
592.11
0.305054
609.129
0.305036
627.121
0.305018
642.4
0.305
621.969
0.304982
622.504
0.304964
594.583
0.304946
614.354
0.304928
659.29
0.30491
653.691
0.304892
639.216
0.304875
587.597
0.304857
559.727
0.304839
604.653
0.304821
592.498
0.304803
569.23
0.304785
535.785
0.304767
528.108
0.304749
542.355
0.304731
522.421
0.304714
513.794
0.304696
537.646
0.304678
506.888
0.30466
473.717
0.304642
493.972
0.304624
498.859
0.304606
477.019
0.304588
472.729
0.304571
494.622
0.304553
466.269
0.304535
462.22
0.304517
457.392
0.304499
442.458
0.304481
457.043
0.304464
467.598
0.304446
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_8
data_8
-1
Binding energy
eV
30
-0.141732
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
169.3
2262.81
0.301588
0.303818
480.847
0.303818
430.987
0.3038
388.344
0.303783
412.634
0.303765
373.536
0.303747
397.972
0.30373
426.327
0.303712
401.835
0.303694
399.568
0.303676
428.814
0.303659
414.133
0.303641
423.953
0.303623
426.537
0.303606
450.549
0.303588
428.531
0.30357
429.003
0.303552
412.544
0.303535
414.904
0.303517
478.192
0.303499
461.993
0.303482
426.764
0.303464
460.749
0.303446
462.028
0.303429
456.08
0.303411
452.05
0.303393
461.718
0.303376
475.418
0.303358
506.828
0.30334
475.967
0.303323
491.833
0.303305
523.29
0.303287
499.579
0.30327
490.129
0.303252
509.004
0.303234
461.091
0.303217
472.092
0.303199
547.161
0.303181
601.303
0.303164
620.392
0.303146
768.953
0.303129
840.266
0.303111
964.534
0.303093
1086.99
0.303076
1319.45
0.303058
1468.38
0.30304
1678.33
0.303023
1796.69
0.303005
1933.24
0.302988
2065.23
0.30297
2103.63
0.302952
2160.96
0.302935
2242.49
0.302917
2220.53
0.3029
2262.81
0.302882
2225.28
0.302864
2229.86
0.302847
2080.59
0.302829
1934.2
0.302812
1644.75
0.302794
1322.26
0.302776
1178.64
0.302759
1010.55
0.302741
778.652
0.302724
549.657
0.302706
507.93
0.302689
372.081
0.302671
304.408
0.302654
285.385
0.302636
275.868
0.302618
259.977
0.302601
229.89
0.302583
230.963
0.302566
245.603
0.302548
218.806
0.302531
256.732
0.302513
231.012
0.302496
248.027
0.302478
221.299
0.302461
200.341
0.302443
180.26
0.302426
213.983
0.302408
201.634
0.30239
200.547
0.302373
184.608
0.302355
179.113
0.302338
186.305
0.30232
211.683
0.302303
184.461
0.302285
199.739
0.302268
182.315
0.30225
193.764
0.302233
193.136
0.302215
185.273
0.302198
188.048
0.30218
174.446
0.302163
198.89
0.302146
169.3
0.302128
205.764
0.302111
186.658
0.302093
177.25
0.302076
203.224
0.302058
209.11
0.302041
208.997
0.302023
204.806
0.302006
228.51
0.301988
213.057
0.301971
199.126
0.301953
206.243
0.301936
204.923
0.301919
233.86
0.301901
189.775
0.301884
184.758
0.301866
199.8
0.301849
196.019
0.301831
203.55
0.301814
214.485
0.301796
209.259
0.301779
198.574
0.301762
196.595
0.301744
203.16
0.301727
198.834
0.301709
196.116
0.301692
192.084
0.301675
184.118
0.301657
199.589
0.30164
193.113
0.301622
211.426
0.301605
220.28
0.301588
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
150
1
0
0
1000
2000
55
0
data_9
data_9
-1
Binding energy
eV
542
-0.141732
2
counts
d
Transmission
d
pulse counting
0.2
1
4.00E-06
0
0
0
0
256
5529.41
8008.53
0.389539
0.393976
8008.53
0.393976
6677.73
0.39394
6559.05
0.393905
6604.43
0.393869
6335.88
0.393834
6500.21
0.393798
6720.66
0.393763
6618.33
0.393727
6549.21
0.393692
6391.57
0.393657
6473.39
0.393621
6443.87
0.393586
6469.68
0.393551
6331.4
0.393515
6241.69
0.39348
6397.13
0.393444
6316.67
0.393409
6267.91
0.393374
6087.79
0.393338
6251.95
0.393303
6190.7
0.393268
6150.74
0.393233
6186.46
0.393197
6249.35
0.393162
6149.17
0.393127
6138.07
0.393091
6177.25
0.393056
6300.23
0.393021
6186.5
0.392986
6391.69
0.39295
6257.99
0.392915
6415.24
0.39288
6022.19
0.392845
6094.27
0.39281
6371.83
0.392774
6115.78
0.392739
5977.34
0.392704
6066.24
0.392669
6094.37
0.392634
6105.63
0.392599
6044.02
0.392564
6035.95
0.392528
6138.59
0.392493
5977.46
0.392458
6023.68
0.392423
6184.38
0.392388
6183.82
0.392353
6323.03
0.392318
6333.16
0.392283
6263.64
0.392248
6303.06
0.392213
6426.88
0.392178
6371.04
0.392143
6349.26
0.392108
6639.79
0.392073
6630.64
0.392038
6654.19
0.392003
6742.02
0.391968
6633.76
0.391933
6765.18
0.391898
6578.89
0.391863
6836.23
0.391828
6815.58
0.391793
6796.7
0.391758
6879.28
0.391723
7002.65
0.391688
6771.58
0.391653
6823.67
0.391618
7208.09
0.391583
7195.82
0.391548
7145.39
0.391513
7476.24
0.391479
7345.86
0.391444
7393.33
0.391409
7550.25
0.391374
7389.21
0.391339
7204.24
0.391304
7128.56
0.391269
7054.26
0.391235
6696.1
0.3912
6728.11
0.391165
6197.27
0.39113
6290.25
0.391095
6260.53
0.391061
5953.51
0.391026
5795.94
0.390991
5983.29
0.390956
5715.31
0.390922
5713.73
0.390887
5835.07
0.390852
5624.98
0.390817
5833.5
0.390783
5753.28
0.390748
5909.53
0.390713
5780.53
0.390679
5685.01
0.390644
5560.57
0.390609
5659.45
0.390575
5768.66
0.39054
5705.75
0.390505
5636.88
0.390471
5674.28
0.390436
5719.33
0.390401
5690.49
0.390367
5624.79
0.390332
5564.77
0.390298
5695.56
0.390263
5642.75
0.390228
5529.41
0.390194
5584.73
0.390159
5542.99
0.390125
5577.66
0.39009
5751.82
0.390056
5840.85
0.390021
5630.68
0.389987
5683.85
0.389952
5741.45
0.389918
5548.57
0.389883
5747.12
0.389849
5832.3
0.389814
5889.15
0.38978
5834.65
0.389745
6070.01
0.389711
5978.05
0.389676
6147.19
0.389642
5885.13
0.389607
5749.67
0.389573
7041.01
0.389539
 
ONE EPITAXIAL LAYER AlGaAs ON GaAs (AS RECD,35TOA)
2003
5
7
23
5
35
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
50
1
0
0
1000
2000
55
0
data_10
data_10
-1
Binding energy
eV
86
-0.15748
2
counts
d
Transmission
d
pulse counting
0.2
40
4.00E-06
0
0
0
0
256
0
790
0.308415
0.31105
151
0.31105
150
0.311029
174
0.311008
120
0.310987
123
0.310966
198
0.310945
124
0.310924
174
0.310903
144
0.310882
136
0.310861
225
0.31084
164
0.310819
124
0.310798
195
0.310777
206
0.310756
150
0.310735
105
0.310714
237
0.310693
140
0.310672
117
0.310651
124
0.310631
68
0.31061
147
0.310589
47
0.310568
204
0.310547
141
0.310526
134
0.310505
148
0.310484
190
0.310463
159
0.310443
146
0.310422
91
0.310401
148
0.31038
82
0.310359
221
0.310338
192
0.310317
173
0.310297
152
0.310276
127
0.310255
136
0.310234
129
0.310213
217
0.310192
171
0.310171
260
0.310151
106
0.31013
139
0.310109
87
0.310088
165
0.310067
87
0.310047
210
0.310026
169
0.310005
198
0.309984
205
0.309963
141
0.309943
224
0.309922
173
0.309901
223
0.30988
206
0.30986
200
0.309839
159
0.309818
316
0.309797
330
0.309776
415
0.309756
492
0.309735
544
0.309714
588
0.309693
790
0.309673
641
0.309652
736
0.309631
706
0.309611
724
0.30959
623
0.309569
630
0.309548
708
0.309528
542
0.309507
380
0.309486
258
0.309466
183
0.309445
287
0.309424
186
0.309403
178
0.309383
184
0.309362
97
0.309341
77
0.309321
80
0.3093
148
0.309279
94
0.309259
85
0.309238
153
0.309217
94
0.309197
91
0.309176
94
0.309155
62
0.309135
36
0.309114
0
0.309094
127
0.309073
65
0.309052
81
0.309032
56
0.309011
133
0.30899
72
0.30897
56
0.308949
151
0.308929
104
0.308908
45
0.308887
70
0.308867
53
0.308846
64
0.308826
127
0.308805
88
0.308784
61
0.308764
1
0.308743
19
0.308723
15
0.308702
81
0.308682
60
0.308661
76
0.30864
65
0.30862
104
0.308599
27
0.308579
37
0.308558
51
0.308538
72
0.308517
162
0.308497
168
0.308476
145
0.308456
19
0.308435
150
0.308415
end of experiment
